Prof. Jong-Shinn Wu was invited to give a talk at MRS-J 2013 (Annual meeting of Materials Research Society of Japan) on the subject of parallel plasma fluid modeling (40 min) with the following title: Parallel Fluid Modeling of CF4 Inductively Coupled Plasma Source Considering Silicon Dioxide Etching Process.
Prof. Jong-Shinn Wu was invited to give a talk at MRS-J 2013 (Annual meeting of Materials Research Society of Japan) on the subject of parallel plasma fluid modeling (Posted: December 15, 2013)
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