Aerothermal & Plasma Physics Laboratory News 賀！本研究室畢業生邱沅明博士獲得 「第17屆科林論文獎」(Lam Research Award)博士論文優等獎(11/1/2012)

賀！本研究室畢業生邱沅明博士獲得 「第17屆科林論文獎」(Lam Research Award)博士論文優等獎(11/1/2012)

2018 年 6 月 14 日2018 年 6 月 14 日 吳 宗信吳 宗信 0 Comment 下午 1:20
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賀！本研究室畢業生邱沅明博士獲得 「第17屆科林論文獎」(Lam Research Award) 博士班畢業論文優等獎 (only 2)：
機械工程學系博士班-邱沅明博士 （指導教授：吳宗信教授）
論文題目：以平行化二維流體模型模擬CF4低溫電感耦合式電漿源蝕刻二氧化矽(SiO2)之研究
Numerical Investigation of Carbontetrafluoride Inductively Coupled Plasma Source Considering Silicon Dioxide Etching Process Using a parallel 2-D Axisymmetric Fluid Model

https://rdweb.adm.nctu.edu.tw/ann_show.php?serial=1624

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